JPH0241629Y2 - - Google Patents

Info

Publication number
JPH0241629Y2
JPH0241629Y2 JP1982062704U JP6270482U JPH0241629Y2 JP H0241629 Y2 JPH0241629 Y2 JP H0241629Y2 JP 1982062704 U JP1982062704 U JP 1982062704U JP 6270482 U JP6270482 U JP 6270482U JP H0241629 Y2 JPH0241629 Y2 JP H0241629Y2
Authority
JP
Japan
Prior art keywords
flat plate
mask body
holding frame
mask
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982062704U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58166647U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982062704U priority Critical patent/JPS58166647U/ja
Priority to US06/489,315 priority patent/US4525060A/en
Publication of JPS58166647U publication Critical patent/JPS58166647U/ja
Application granted granted Critical
Publication of JPH0241629Y2 publication Critical patent/JPH0241629Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1982062704U 1982-04-28 1982-04-28 露光装置 Granted JPS58166647U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1982062704U JPS58166647U (ja) 1982-04-28 1982-04-28 露光装置
US06/489,315 US4525060A (en) 1982-04-28 1983-04-28 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982062704U JPS58166647U (ja) 1982-04-28 1982-04-28 露光装置

Publications (2)

Publication Number Publication Date
JPS58166647U JPS58166647U (ja) 1983-11-07
JPH0241629Y2 true JPH0241629Y2 (en]) 1990-11-06

Family

ID=13207961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982062704U Granted JPS58166647U (ja) 1982-04-28 1982-04-28 露光装置

Country Status (2)

Country Link
US (1) US4525060A (en])
JP (1) JPS58166647U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2337129A (en) * 1998-01-29 1999-11-10 Steven Coe Method and apparatus for producing graphic art

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4515521Y1 (en]) * 1966-08-05 1970-06-29
GB2063523B (en) * 1978-10-20 1982-12-15 Hitachi Ltd Wafer position setting apparatus
JPS5729047A (en) * 1980-07-29 1982-02-16 Oodoko Seisakusho:Kk Device for operating photosensitive plate holder of photocomposer
US4431304A (en) * 1981-11-25 1984-02-14 Mayer Herbert E Apparatus for the projection copying of mask patterns on a workpiece

Also Published As

Publication number Publication date
JPS58166647U (ja) 1983-11-07
US4525060A (en) 1985-06-25

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